Femtosecond laser micromachining is becoming an established technique for the fabrication of complex three-dimensional structures in glass. The possibility to encompass both optical and fluidic components in a single substrate allows us to realize optofluidic devices usable in several application fields. We present new investigations of laser-assisted etching in Eagle XG glass showing good etching conditions at low repetition rates and low irradiation speeds, which allow for complex microchannel network formation.
We present an optimization of the dynamics of integrated optical switches based on thermal phase shifters. Simulations, surface micromachining and innovative layouts allowed us to improve the temporal response of the optical switches down to a few milliseconds. In addition, taking advantage of an electrical pulse shaping approach where an optimized voltage signal is applied to the heater, we proved a switching time as low as 78 µs, about two orders of magnitude shorter with respect to the current state of the art of thermally-actuated optical switches in glass.