Femtosecond laser micromachining is becoming an established technique for the fabrication of complex three-dimensional structures in glass. The possibility to encompass both optical and fluidic components in a single substrate allows us to realize optofluidic devices usable in several application fields. We present new investigations of laser-assisted etching in Eagle XG glass showing good etching conditions at low repetition rates and low irradiation speeds, which allow for complex microchannel network formation.
